HORIBA堀场化学溶液监控系统 CS-1000 深圳市伟烨鑫科技有限公司

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产品名称：HORIBA堀场化学溶液监控系统
产品型号：CS-1000
产品厂商：HORIBA堀场
产品价格：0
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【Basic Specification】

Product name	Chemical Solution Monitoring System
Model	CS-1000
Measurement item	Chemical Concentration, Conductivity, pH
Measurement principle	Absorption spectroscopic method, 2-electrode method, Glass electrode
Target chemicals	Multi-component chemical solutions used in semiconductor manufacturing processes (Please contact us for details)
Dimension	700 (W) × 610 (D) × 1640 (H) mm (Excluding protrusions)
Weight	Approx. 200kg
Wetted materials	Cabinet (PFA, PTFE) Absorbance Monitor (PFA, PTFE, Quartz, Kalrez™) Conducvitity Meter (PFA, Carbon, Kalrez™) pH Meter - Drain use (PVC, PTFE, Glass, ETFE, PEEK, Olefinic resin, THV, PFA, Kalrez™, PharMed BPT) ※Karlez™ is trademarks of DuPont de Nemours, Inc.
Conforming standards	CE , KC , FCC Rules Part15 , UKCA , SEMI S2

【Condition of installation】

Ambient temperature	20 to 30 degree C (Within ± 0.5 degree/1hour, sudden temperature change should be avoided)
Ambient humidity	40 to 70%RH (Should be no dew condensation)
Power source	AC 190～240V (Single-Phase）、50/60Hz
Power consumption	Approx. 355VA (Transient electric current at the time of the start is excluded)
Communication	Analog Output: Hardwired_4-20mA, Serial: RS-485_Modbus RTU, Parallel IO (refer to attachement) ※ Signal output is fixed at 1.5mA when measured values are not updated, such as monitor error.

【Maintenance】

Consumables	Replacement parts by customer or HORIBA service engineers. Halogen lamp (Rated life: approx. 1 year) Deteurium lamp (Rated life: approx. half year) Reagent： pH4, pH7, KCl 3.33moL AgCl Saturate (Raplacement term: approx. half year)

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